X-ray spectrometry in Scanning Electron Microscopes (SEMs) has routinely been used for decades. EDAX is proud to be a pioneer in this technology with one of the first Energy Dispersive Spectroscopy (EDS) systems designed for SEM applications. The qualitative and quantitative analysis of the measured raw data (the spectra) requires the utilization of complex non-linear models, which were developed over time and further progress is still being made today. Find out more about these models in our latest technical note.
Click here to download the EDS/WDS Geometry and the Famous Take-off Angle technical note.