The XLNCE SMX-ILH patented Thermal Shield facilitates real-time XRF data of hot substrates up to 300˚C, reducing panel dwell times, and improving the process throughput. A devoted Z-axis height adjustment feature further enhances the measurement quality by accommodating bow and warp along with planarity deviations common to larger panels, especially at higher temperatures.
- Composition and thickness analysis
- Material selection, layer formulations
- In-line and off-line process control
- Yield management
Specialized application areas:
- Metal film stack composition such as CIGS
- Photovoltaic manufacturing process
- Micro-electronic manufacturing
- Corrosion resistance coating
- Thermal barrier coating
- Energy (CIGS, CIS, batteries)
Resources
Product Bulletin