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The XLNCE SMX-BEN is a benchtop Energy Dispersive X-ray Fluorescence (EDXRF) analyzer that provides non-destructive, composition and coating thickness measurement and analysis on virtually all materials. It is an excellent choice for R&D, process development, process control, and failure analysis. It facilitates and accelerates material selection and recipe formulation in a pre- or early production phase and supports in-process platform tools well into capacity production.


  • Offers an array of choices for X-ray optics and primary filters
  • Equipped with latest generation of Silicon Drift Detectors
  • Provides empirical and fundamental parameters (FP) solutions in a simple to set up calibration process
  • Large analysis chamber
  • X-Y-Z programmable positioning

Specialized application areas:
  • Photovoltaic manufacturing
  • Protective metallic coatings
  • Wafer level metallization and micro-electronics
  • Corrosion/wear and thermal barrier analysis

The XLNCE SMX-BEN delivers performance and versatility at an unbeatable price-to-performance ratio.

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