WDS Course

For a better understanding of WDS/Genesis software, five days are spent on advanced EDS. WDS should not be viewed as a stand-alone analysis technique, but should be used complementary to EDS.

Day 1:

Morning – Advanced EDS Theory and Practical Session
Important parameters/things to realize when setting up EDS analysis
Quantification/SEC factors
Element Detective
Mapping (live, live spectral mapping, quant mapping)
Using live spectral data sets to do recalculations/line scans
Linescans
Phase Cluster Analysis
Q & A section for EDS

Lunch

Afternoon – WDS Theory

Basic Principles of WDS, Microprobe Analysis
Basic Principles of Parallel Beam Spectrometry (PBS )
 • Optics
 • Diffractors
 • Proportional Counters

Basic Operation of GenWDS
Operation of Z-Stage
Operation of WDS shell

Day 2:

Morning – WDS Theory

Performance of LEXS & TEXS
Choice of Diffractors
Optimizing the prop counter
Sample spectra

Lunch

Afternoon – WDS Practical Session

Basics of WDS:

            Explain/Show the 3 scan modes
            Scan several elements in each mode
            Show multiple element scans/overlay on EDS spectrum
            Optimize Height for a new sample area; use fixed WD, then Z-Stage
             Show the element configuration table, then how to edit it.

Day 3:

Morning- WDS Practical Session

Selecting HV for elements not measured
Calibrating with 1 and 2 energies (DQX/2d spacing)
Peak Deconvolution
Intelligent Scan

Lunch

Afternoon – WDS practical Session

Mapping
Requirements for live mapping
Setting up a mapping

Running Quantification

Deciding on Standards
Multipoint  Setup and use
Use of Faraday cage
Processing Standards
WDS Quant only
Combined EDS/WDS Quant

Customer samples

Q & A section for WDS

Note: For this training, customers are strongly encouraged to bring their own samples (either conductive or carbon coated). We do not have a low vacuum SEM. In case of WDS quantification, please also bring the standards (either compounds (e.g. SiO2 for determining Si) or pure standards.