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EDAX offers energy dispersive spectroscopy (EDS), electron backscatter diffraction (EBSD), wavelength dispersive spectrometry (WDS) and micro x-ray fluorescence (Micro-XRF) products
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X-ray Metrology
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XLNCE X-ray Metrology


SMX-BEN XRF Analyzer
The XLNCE SMX-BEN is a benchtop Energy Dispersive X-ray Fluorescence (EDXRF) analyzer that provides non-destructive, composition and coating thickness measurement and analysis on virtually all materials. It is an excellent choice for R&D, process development, process control, and failure analysis. It facilitates and accelerates material selection and recipe formulation in a pre- or early production phase and supports in-process platform tools well into capacity production.

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