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EDAX offers energy dispersive spectroscopy (EDS), electron backscatter diffraction (EBSD), wavelength dispersive spectrometry (WDS) and micro x-ray fluorescence (Micro-XRF) products
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XLNCE X-ray Metrology



XLNCE SMX-BEN 

SMX-BEN XRF Analyzer
The XLNCE SMX-BEN is a benchtop Energy Dispersive X-ray Fluorescence (EDXRF) analyzer that provides non-destructive, composition and coating thickness measurement and analysis on virtually all materials. It is an excellent choice for R&D, process development, process control, and failure analysis. It facilitates and accelerates material selection and recipe formulation in a pre- or early production phase and supports in-process platform tools well into capacity production.




EDAX XLNCE SMX-ILH XRF In-Line Analyzer 

SMX-ILH XRF In-Line Analyzer
The SMX-ILH XRF system is a process control and yield management platform that offers integrated and remote module configurations for in-line atmospheric analysis of coating composition and thickness measurements of rigid and flexible substrates. This system allows the movement of coated material through the measuring enclosure for full panel analysis either in static or across the gradient locations through a motorized, programmable single or dual integrated measuring module.


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